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公开(公告)号：US10656402B2
公开(公告)日：2020-05-19
申请号：US15418612
申请日：2017-01-27
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler , Richard P. Tella
Abstract: A scanning apparatus having a stage adapted to hold a specimen to be imaged and to move the specimen in a first direction, and a light source that includes a tunable laser that generates a light beam having an illumination wavelength that varies as a function of an input signal is disclosed. The apparatus includes an imaging system having a scanning assembly that includes a focusing lens that focuses the light beam to a measurement point on the specimen, a first mirror that moves in a second direction relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the stage, and a displacement sensor that measures a distance between the scanning assembly at a mapping point on the specimen, and a light detector that measures an intensity of light leaving the measurement point on the specimen.
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公开(公告)号：US20180262699A1
公开(公告)日：2018-09-13
申请号：US15975701
申请日：2018-05-09
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler
CPC classification number: H04N5/33 , G01N21/35 , G01N21/9501 , G01N21/9508 , G02B21/0064 , G02B21/367 , H04N5/23216
Abstract: An apparatus and method for generating images of specimens is disclosed. The apparatus includes an imaging system, controller, and user interface. The imaging system generates a plurality of component images of a specimen, each component image corresponding to a different viewing condition. Each image is represented by an intensity as a function of location on the specimen. The controller stores the component images and generates a compound image from a plurality of the component images. The compound image includes a weighted sum of first and second ones of the component images, the controller displaying the compound image on a display controlled by the controller. The user interface is adapted to control a weighting factor used in generating the weighted sum in response to user input. The controller redisplays the compound image after the weighting factor is changed in response to user input.
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公开(公告)号：US10539504B1
公开(公告)日：2020-01-21
申请号：US16147828
申请日：2018-09-30
Applicant: Agilent Technologies, Inc.
Inventor： Matthew Kole , Andrew Ghetler
IPC: G01N21/552 , G01B11/24
Abstract: An ATR scanning system and a method for positioning a specimen against the reflective surface of an ATR objective are disclosed. The scanning system includes an ATR objective, a controller, a stage, and a height profiler. The controller forms an image of the reflective surface. The stage moves a specimen in a direction toward the reflective surface at a speed determined by the controller. The height profiler measures a minimum distance between the specimen and the reflective surface as the z-axis stage moves the specimen at a first speed. When the specimen is a predetermined distance from the reflective surface of the ATR objective, the controller causes the z-axis stage to move toward the reflective surface at a second speed while forming approach images of the reflective surface to determine if the specimen is in contact with the reflective surface.
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公开(公告)号：US20190004300A1
公开(公告)日：2019-01-03
申请号：US15418612
申请日：2017-01-27
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler , Richard P. Tella
Abstract: A scanning apparatus having a stage adapted to hold a specimen to be imaged and to move the specimen in a first direction, and a light source that includes a tunable laser that generates a light beam having an illumination wavelength that varies as a function of an input signal is disclosed. The apparatus includes an imaging system having a scanning assembly that includes a focusing lens that focuses the light beam to a measurement point on the specimen, a first mirror that moves in a second direction relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the stage, and a displacement sensor that measures a distance between the scanning assembly at a mapping point on the specimen, and a light detector that measures an intensity of light leaving the measurement point on the specimen.
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公开(公告)号：US20170082538A1
公开(公告)日：2017-03-23
申请号：US14863341
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
CPC classification number: G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
Abstract: A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle greater than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar face that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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Patent Agency Ranking
公开(公告)号：US20170003166A1
公开(公告)日：2017-01-05
申请号：US14788561
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler , Adam Kleczewski , Richard P. Tella
CPC classification number: G01J3/0297 , G01J3/10 , G01J3/108 , G01J3/2823 , G01J3/42 , G01N21/274 , G01N21/276 , G01N21/3563 , G01N21/4785 , G01N21/55 , G01N2201/101 , G01N2201/1042 , G01N2201/127
Abstract: A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.
Abstract translation: 公开了在生成中红外（MW）图像期间获得参考样本而不需要去除被成像的样品的方法和装置。 可调谐的MIR激光产生聚焦在样品台上的试样上的光束，该试样台沿第一方向移动试样。 光学组件包括具有聚焦透镜和反射镜的扫描组件，所述聚焦透镜和反射镜相对于所述平台在与第一方向不同的第二方向上移动，使得聚焦透镜在聚焦透镜和样品台之间保持固定的距离。 光检测器测量离开样品点的光的强度。 控制器根据测量的强度形成图像。 定位参考台，使得反射镜响应于命令而在参考平台上移动，使得控制器也可进行参考测量。
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公开(公告)号：US10003754B2
公开(公告)日：2018-06-19
申请号：US14743854
申请日：2015-06-18
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler
CPC classification number: H04N5/33 , G01N21/35 , G01N21/9501 , G01N21/9508 , G02B21/0064 , G02B21/367 , H04N5/23216
Abstract: An apparatus and method for generating images of specimens is disclosed. The apparatus includes an imaging system, controller, and user interface. The imaging system generates a plurality of component images of a specimen, each component image corresponding to a different viewing condition. Each image is represented by an intensity as a function of location on the specimen. The controller stores the component images and generates a compound image from a plurality of the component images. The compound image includes a weighted sum of first and second ones of the component images, the controller displaying the compound image on a display controlled by the controller. The user interface is adapted to control a weighting factor used in generating the weighted sum in response to user input. The controller redisplays the compound image after the weighting factor is changed in response to user input.
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公开(公告)号：US09863877B2
公开(公告)日：2018-01-09
申请号：US14863341
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
IPC: G01N21/552 , G01N21/35 , G02B13/14 , G02B17/00 , G02B17/08 , G01N21/3563 , G01N21/39 , G01J3/02
CPC classification number: G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
Abstract: A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed. The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle less than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar thce that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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公开(公告)号：US09739661B2
公开(公告)日：2017-08-22
申请号：US14788561
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler , Adam Kleczewski , Richard P. Tella
CPC classification number: G01J3/0297 , G01J3/10 , G01J3/108 , G01J3/2823 , G01J3/42 , G01N21/274 , G01N21/276 , G01N21/3563 , G01N21/4785 , G01N21/55 , G01N2201/101 , G01N2201/1042 , G01N2201/127
Abstract: A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.
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公开(公告)号：US20170082490A1
公开(公告)日：2017-03-23
申请号：US14863225
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yang Han
CPC classification number: G01J3/2823 , G01J3/0213 , G01J3/0224 , G01J3/108 , G01J3/28 , G01J3/42
Abstract: An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.
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