Invention Grant
- Patent Title: Method for controlling a particle beam device and particle beam device for carrying out the method
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Application No.: US16151524Application Date: 2018-10-04
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Publication No.: US10658152B1Publication Date: 2020-05-19
- Inventor: Christian Hendrich , Josef Biberger
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/22 ; H01J37/10

Abstract:
A method for controlling a particle beam device for imaging, analyzing and/or processing an object, and a particle beam device for carrying out the method. The particle beam device may be an electron beam device and/or or an ion beam device. The method may include identifying at least one control parameter of a unit of the particle beam device using an eye tracker by tracking at least one eye of a user of the particle beam device, and changing the at least one control parameter of the unit of the particle beam device.
Information query