Invention Grant
- Patent Title: System and method for performing nano beam diffraction analysis
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Application No.: US16050752Application Date: 2018-07-31
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Publication No.: US10658154B2Publication Date: 2020-05-19
- Inventor: Marc Adam Bergendahl , James John Demarest , Christopher J. Penny , Roger Allen Quon , Christopher Joseph Waskiewicz
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: McGinn I.P. Law Group, PLLC
- Agent Vazken Alexanian
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28 ; G01N23/20058
Abstract:
A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
Public/Granted literature
- US20190035599A1 System and Method for Performing Nano Beam Diffraction Analysis Public/Granted day:2019-01-31
Information query
