Invention Grant
- Patent Title: Transistors with vertically opposed source and drain metal interconnect layers
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Application No.: US16326846Application Date: 2016-09-30
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Publication No.: US10658475B2Publication Date: 2020-05-19
- Inventor: Han Wui Then , Sansaptak Dasgupta , Marko Radosavljevic , Paul B. Fischer
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2016/054642 WO 20160930
- International Announcement: WO2018/063278 WO 20180405
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/20 ; H01L29/423 ; H01L29/778 ; H01L29/08 ; H01L29/66 ; H01L21/768 ; H01L29/735

Abstract:
Integrated circuit transistor structures are provided that may reduce capacitive parasitics by using metal on both sides (top and bottom) of a given integrated circuit transistor device layer. For example, in an embodiment, the drain metal interconnect is provided above the transistor device layer, and the source metal interconnect is provided below the transistor layer. Such a configuration reduces the parasitic capacitance not only between the source and drain metal interconnect layers, but also between the neighboring conductors of the drain metal interconnect layer, because the number of pass-thru conductors in the drain metal interconnect layer to access an upper conductor in the source metal interconnect layer is reduced. In other embodiments, the source metal interconnect remains above the transistor device layer, and the drain metal interconnect is moved to below the transistor device layer, to provide similar benefits. Techniques apply equally to any transistor type, including FETs and BJTs.
Public/Granted literature
- US20190198627A1 TRANSISTORS WITH VERTICALLY OPPOSED SOURCE AND DRAIN METAL INTERCONNECT LAYERS Public/Granted day:2019-06-27
Information query
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