Invention Grant
- Patent Title: Techniques for co-integrating transition metal dichalcogenide (TMDC)-based and III-N semiconductor-based transistor devices
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Application No.: US15771752Application Date: 2015-12-02
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Publication No.: US10665707B2Publication Date: 2020-05-26
- Inventor: Han Wui Then , Sansaptak Dasgupta , Marko Radosavljevic
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2015/063341 WO 20151202
- International Announcement: WO2017/095400 WO 20170608
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/267 ; H01L29/20 ; H01L29/24 ; H01L21/8258 ; H01L27/092

Abstract:
Techniques are disclosed for co-integrating transition metal dichalcogenide (TMDC)-based p-channel transistor devices and III-N semiconductor-based n-channel transistor devices. In accordance with some embodiments, a p-channel transistor device configured as described herein may include a layer of TMDC material such as, for example, tungsten diselenide, tungsten disulfide, molybdenum diselenide, or molybdenum disulfide, and an n-channel transistor device configured as described herein may include a layer of III-V material such as, for example, gallium nitride, aluminum nitride, aluminum gallium nitride, and indium aluminum nitride. Transistor structures provided as described herein may be utilized, for instance, in power delivery applications where III-N semiconductor-based n-channel power transistor devices can benefit from being integrated with low-leakage, high-performance p-channel devices providing logic and control circuitry. In some cases, a TMDC-based transistor provided as described herein may exhibit p-channel mobility in excess of bulk Si and thus may exhibit faster performance than traditional Si-based p-channel transistors.
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