Invention Grant
- Patent Title: Semiconductor device with redistribution layers on partial encapsulation and non-photosensitive passivation layers
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Application No.: US16261102Application Date: 2019-01-29
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Publication No.: US10672699B2Publication Date: 2020-06-02
- Inventor: Jong Sik Paek , Jin Young Kim , YoonJoo Kim , Jin Han Kim , SeungJae Lee , Se Woong Cha , SungKyu Kim , Jae Hun Bae , Dong Jin Kim , Doo Hyun Park
- Applicant: Amkor Technology, Inc.
- Applicant Address: US AZ Tempe
- Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee Address: US AZ Tempe
- Agency: McAndres, Held & Mallory, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@d76e342
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/00 ; H01L23/31 ; H01L21/56

Abstract:
A semiconductor device with redistribution layers on partial encapsulation is disclosed and may include providing a carrier with a non-photosensitive protection layer, forming a pattern in the non-photosensitive protection layer, providing a semiconductor die with a contact pad on a first surface, and bonding the semiconductor die to the non-photosensitive protection layer such that the contact pad aligns with the pattern formed in the non-photosensitive protection layer. A second surface opposite to the first surface of the semiconductor die, side surfaces between the first and second surfaces of the semiconductor die, and a portion of a first surface of the non-photosensitive protection layer may be encapsulated with an encapsulant. The carrier may be removed leaving the non-photosensitive protection layer bonded to the semiconductor die. A redistribution layer may be formed on the contact pad and a second surface of the non-photosensitive protection layer opposite to the first surface.
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