Invention Grant
- Patent Title: Tank, target generation device, and extreme-UV-light generation device
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Application No.: US16126829Application Date: 2018-09-10
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Publication No.: US10674590B2Publication Date: 2020-06-02
- Inventor: Toshiyuki Hirashita , Toshihiro Nishisaka
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
A tank may include: a tank main body having a space and an opening; a lid body covering the opening and a peripheral portion of the opening; a bolt for fixing the tank main body and the lid body in the peripheral portion; a first support portion arranged to surround the opening in a region on a side of the opening with respect to the bolt to support the lid body; a second support portion arranged to surround the opening in a region on the opening side with respect to the first support portion and having a height lower than a height of the first support portion; and a sealing member arranged to surround the opening in the region on the opening side with respect to the first support portion.
Public/Granted literature
- US20190008026A1 TANK, TARGET GENERATION DEVICE, AND EXTREME-UV-LIGHT GENERATION DEVICE Public/Granted day:2019-01-03
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