Invention Grant
- Patent Title: Hydrogen co-gas when using aluminum iodide as an ion source material
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Application No.: US15995707Application Date: 2018-06-01
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Publication No.: US10676370B2Publication Date: 2020-06-09
- Inventor: Neil Colvin , Tseh-Jen Hsieh , Neil Basson
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: C01F7/48
- IPC: C01F7/48 ; C23C16/12 ; H01J37/317 ; C01B7/13 ; C23C14/48 ; C23C16/448 ; H01L21/02 ; H01L21/265 ; H01J37/08 ; H01L21/306

Abstract:
An ion implantation system is provided having an ion source configured to form an ion beam from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station configured to accept the ion beam for implantation of aluminum ions into a workpiece. An arc chamber forms a plasma from the aluminum iodide, where arc current from a power supply is configured to dissociate aluminum ions from the aluminum iodide. One or more extraction electrodes extract the ion beam from the arc chamber. A hydrogen co-gas source further introduces a hydrogen co-gas to react residual aluminum iodide and iodide, where the reacted residual aluminum iodide and iodide is evacuated from the system.
Public/Granted literature
- US20180346342A1 Hydrogen CO-Gas When Using Aluminum Iodide as an Ion Source Material Public/Granted day:2018-12-06
Information query
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