Invention Grant
- Patent Title: Statistical analysis in X-ray imaging
-
Application No.: US15407098Application Date: 2017-01-16
-
Publication No.: US10685759B2Publication Date: 2020-06-16
- Inventor: Wilfred Kelsham Fullagar , Andrew Maurice Kingston , Glenn Robert Myers , Mahsa Paziresh , Trond Karsten Varslot
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@77181349
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00 ; G01N23/046 ; G01N23/2252

Abstract:
A method of analyzing a specimen using X-rays, comprising the steps of: Irradiating the specimen with input X-rays; Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation, which method further comprises the following steps: Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1. For each pixel pi in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i; A variance σ2S in S per pixel position i. Using these values S and σ2S to produce a map of mean X-ray photon energy E per pixel.
Public/Granted literature
- US20180204647A1 STATISTICAL ANALYSIS IN X-RAY IMAGING Public/Granted day:2018-07-19
Information query