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公开(公告)号：US10685759B2
公开(公告)日：2020-06-16
申请号：US15407098
申请日：2017-01-16
Applicant: FEI Company
Inventor： Wilfred Kelsham Fullagar , Andrew Maurice Kingston , Glenn Robert Myers , Mahsa Paziresh , Trond Karsten Varslot
IPC: G01N23/00 , G21K7/00 , G01N23/046 , G01N23/2252
Abstract: A method of analyzing a specimen using X-rays, comprising the steps of: Irradiating the specimen with input X-rays; Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation, which method further comprises the following steps: Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1. For each pixel pi in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i; A variance σ2S in S per pixel position i. Using these values S and σ2S to produce a map of mean X-ray photon energy E per pixel.
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公开(公告)号：US10354418B2
公开(公告)日：2019-07-16
申请号：US15504302
申请日：2015-08-15
Applicant: FEI Company
Inventor： Benoit Mathieu Baptiste Recur , Mahsa Paziresh , Glenn Robert Myers , Andrew Maurice Kingston , Shane Jamie Latham
Abstract: Some embodiments of the invention provide a method of determining a material characteristic of material in a sample by iterative tomographic reconstruction. The method conducts one or more X-ray tomography scans of a sample, and then determines one or more estimated material characteristics, such as atomic number and density, for multiple volume elements in the sample using a tomographic reconstruction algorithm. These estimated material characteristics are then modified by reference to stored known material characteristic data. Preferably, determining the composition of the sample volume during reconstruction includes segmenting the sample into regions of common composition, the segmenting being performed during iterative reconstruction instead of being based on the voxel characteristics determined upon the completion of iterative reconstruction. Preferred versions will perform one or more additional iterations of the tomographic reconstruction algorithm, where each iteration updates the one or more estimated material characteristics for the volume elements.
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公开(公告)号：US20180204647A1
公开(公告)日：2018-07-19
申请号：US15407098
申请日：2017-01-16
Applicant: FEI Company
Inventor： Wilfred Kelsham Fullagar , Andrew Maurice Kingston , Glenn Robert Myers , Mahsa Paziresh , Trond Karsten Varslot
Abstract: A method of analyzing a specimen using X-rays, comprising the steps of: Irradiating the specimen with input X-rays; Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation, which method further comprises the following steps: Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1. For each pixel piin each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i; A variance σ2S in S per pixel position i. Using these values S and σ2S to produce a map of mean X-ray photon energy E per pixel.
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公开(公告)号：US20180082447A1
公开(公告)日：2018-03-22
申请号：US15504302
申请日：2015-08-15
Applicant: FEI Company
Inventor： Benoit Mathieu Baptiste Recur , Mahsa Paziresh , Glenn Robert Myers , Andrew Maurice Kingston , Shane Jamie Latham
CPC classification number: G06T11/008 , G06K9/6218 , G06K9/6277 , G06T7/11 , G06T11/006 , G06T2207/10081 , G06T2207/10116 , G06T2207/30181 , G06T2211/408 , G06T2211/424
Abstract: Some embodiments of the invention provide a method of determining a material characteristic of material in a sample by iterative tomographic reconstruction. The method conducts one or more X-ray tomography scans of a sample, and then determines one or more estimated material characteristics, such as atomic number and density, for multiple volume elements in the sample using a tomographic reconstruction algorithm. These estimated material characteristics are then modified by reference to stored known material characteristic data. Preferably, determining the composition of the sample volume during reconstruction includes segmenting the sample into regions of common composition, the segmenting being performed during iterative reconstruction instead of being based on the voxel characteristics determined upon the completion of iterative reconstruction. Preferred versions will perform one or more additional iterations of the tomographic reconstruction algorithm, where each iteration updates the one or more estimated material characteristics for the volume elements.
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