Invention Grant
- Patent Title: Fluid control device
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Application No.: US15640735Application Date: 2017-07-03
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Publication No.: US10697449B2Publication Date: 2020-06-30
- Inventor: Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Yung-Lung Han , Chi-Feng Huang
- Applicant: Microjet Technology Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MICROJET TECHNOLOGY CO., LTD.
- Current Assignee: MICROJET TECHNOLOGY CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@74ab2385
- Main IPC: F04B43/04
- IPC: F04B43/04 ; F04B17/00 ; F04B43/02 ; F04B43/00 ; F04B39/10

Abstract:
A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction away from the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of vibration plate.
Public/Granted literature
- US20180066644A1 FLUID CONTROL DEVICE Public/Granted day:2018-03-08
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