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公开(公告)号：US20140377099A1
公开(公告)日：2014-12-25
申请号：US14272272
申请日：2014-05-07
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ta-Wei Hsueh , Ying-Lun Chang , Hsiang-Dyi Wu , Rong-Ho Yu , Shih-Chang Chen , Tsung-Pat Chou , Yau-Ji Lee , Jia-Yu Liao
CPC classification number: F04B43/046 , F04B49/22
Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.
Abstract translation: 微型气体压力驱动装置包括微型气体输送模块和微型阀模块。 微型气体输送模块包括气体入口板，流体通道板，共振膜和压电致动器。 在共振膜和压电致动器之间限定第一腔室。 在激活压电致动器以通过气体入口板供给气体之后，气体通过流体通道板和共振膜转移到第一室，然后向下传送。 因此，产生压力梯度以连续地推动气体。 微型阀模块包括气体收集板，阀膜和气体出口板。 在气体从微型气体输送模块传送到气体收集室之后，气体沿一个方向传送，从而选择性地执行压力收集操作或压力释放操作。
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Patent Agency Ranking
公开(公告)号：US10343405B2
公开(公告)日：2019-07-09
申请号：US15641054
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Jheng-Wei Chen
IPC: B29C53/04 , F04B17/00 , F04B43/04 , H01L41/23 , H01L41/25 , B41J2/16 , B29C65/48 , B29C69/00 , B29L31/00
Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.
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公开(公告)号：US20180066644A1
公开(公告)日：2018-03-08
申请号：US15640735
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Yung-Lung Han , Chi-Feng Huang
IPC: F04B43/04
Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction away from the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of vibration plate.
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公开(公告)号：US10697449B2
公开(公告)日：2020-06-30
申请号：US15640735
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Yung-Lung Han , Chi-Feng Huang
Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction away from the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of vibration plate.
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公开(公告)号：US20180065370A1
公开(公告)日：2018-03-08
申请号：US15641054
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Jheng-Wei Chen
CPC classification number: B41J2/1623 , B29C53/04 , B29C65/48 , B29C69/00 , B29L2031/7496 , B29L2031/767 , B41J2/161 , F04B17/003 , F04B43/046 , H01L41/23 , H01L41/25
Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.
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公开(公告)号：US09611843B2
公开(公告)日：2017-04-04
申请号：US14272272
申请日：2014-05-07
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ta-Wei Hsueh , Ying-Lun Chang , Hsiang-Dyi Wu , Rong-Ho Yu , Shih-Chang Chen , Tsung-Pat Chou , Yau-Ji Lee , Jia-Yu Liao
CPC classification number: F04B43/046 , F04B49/22
Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.
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