Invention Grant
- Patent Title: Cathodoluminescence optical hub
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Application No.: US16408703Application Date: 2019-05-10
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Publication No.: US10707051B2Publication Date: 2020-07-07
- Inventor: John Andrew Hunt , Michael Bertilson , Tom Worsley
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: Gatan, Inc.
- Current Assignee: Gatan, Inc.
- Current Assignee Address: US CA Pleasanton
- Agency: Snyder, Clark, Lesch & Chung, LLP
- Main IPC: G02B21/06
- IPC: G02B21/06 ; H01J37/22 ; H01J37/26

Abstract:
An apparatus for collection, distribution, and analysis of cathodoluminescence (CL) and other light signals in an electron microscope is provided. The optical hub, utilizing a linear-translating fold-mirror and mounted to the electron microscope, is used to receive essentially collimated light collected from a collection-mirror and efficiently route the collected light to a plurality of light-analysis instruments. The linear-translating fold-mirror can provide fine positional alignment of the light signal, and in an aspect of the invention can be used to select or scan a portion of the collected light-pattern into an optical slit or aperture. In one aspect, the optical hub includes a light filter mechanism that can track the movement of the fold-mirror. In an aspect, the optical hub also controls the positioning of the collection-mirror in proximity to the specimen being analyzed.
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