公开(公告)号：US11205559B2

公开(公告)日：2021-12-21

申请号：US17077217

申请日：2020-10-22

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Michael Bertilson

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/244 ,  H01J37/29

Abstract: Systems and methods for automated alignment of cathodoluminescence (CL) optics in an electron microscope relative to a sample under inspection are described. Accurate placement of the sample and the electron beam landing position on the sample with respect to the focal point of a collection mirror that reflects CL light emitted by the sample is critical to optimizing the amount of light collected and to preserving information about the angle at which light is emitted from the sample. Systems and methods are described for alignment of the CL mirror in the XY plane, which is orthogonal to the axis of the electron beam, and for alignment of the sample with respect to the focal point of the CL mirror along the Z axis, which is coincident with the electron beam.

公开(公告)号：US11688581B2

公开(公告)日：2023-06-27

申请号：US17223146

申请日：2021-04-06

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Michael Bertilson

IPC: H01J37/244 ,  G01J3/02 ,  G01J3/44 ,  G01N21/66 ,  H01J37/22 ,  H01J37/285

CPC classification number: H01J37/244 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/4406 ,  G01N21/66 ,  H01J37/226 ,  H01J37/285 ,  H01J2237/2445 ,  H01J2237/262 ,  H01J2237/2855

Abstract: Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.

公开(公告)号：US10707051B2

公开(公告)日：2020-07-07

申请号：US16408703

申请日：2019-05-10

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Michael Bertilson ,  Tom Worsley

IPC: G02B21/06 ,  H01J37/22 ,  H01J37/26

Abstract: An apparatus for collection, distribution, and analysis of cathodoluminescence (CL) and other light signals in an electron microscope is provided. The optical hub, utilizing a linear-translating fold-mirror and mounted to the electron microscope, is used to receive essentially collimated light collected from a collection-mirror and efficiently route the collected light to a plurality of light-analysis instruments. The linear-translating fold-mirror can provide fine positional alignment of the light signal, and in an aspect of the invention can be used to select or scan a portion of the collected light-pattern into an optical slit or aperture. In one aspect, the optical hub includes a light filter mechanism that can track the movement of the fold-mirror. In an aspect, the optical hub also controls the positioning of the collection-mirror in proximity to the specimen being analyzed.

公开(公告)号：US20210313141A1

公开(公告)日：2021-10-07

申请号：US17223146

申请日：2021-04-06

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Michael Bertilson

IPC: H01J37/244 ,  H01J37/22 ,  G01J3/02 ,  G01J3/44 ,  G01N21/66 ,  H01J37/285

Abstract: Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.

公开(公告)号：US10943764B2

公开(公告)日：2021-03-09

申请号：US16426629

申请日：2019-05-30

Applicant: Gatan, Inc.

Inventor： Michael Bertilson ,  John Andrew Hunt ,  David J. Stowe

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.

公开(公告)号：US11764032B2

公开(公告)日：2023-09-19

申请号：US17193154

申请日：2021-03-05

Applicant: Gatan, Inc.

Inventor： Michael Bertilson ,  John Andrew Hunt ,  David J. Stowe

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2808

Abstract: Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.

公开(公告)号：US20210210305A1

公开(公告)日：2021-07-08

申请号：US17193154

申请日：2021-03-05

Applicant: Gatan, Inc.

Inventor： Michael Bertilson ,  John Andrew Hunt ,  David J. Stowe

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.

公开(公告)号：US20210125807A1

公开(公告)日：2021-04-29

申请号：US17077217

申请日：2020-10-22

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Michael Bertilson

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/20 ,  H01J37/29

Abstract: Systems and methods for automated alignment of cathodoluminescence (CL) optics in an electron microscope relative to a sample under inspection are described. Accurate placement of the sample and the electron beam landing position on the sample with respect to the focal point of a collection mirror that reflects CL light emitted by the sample is critical to optimizing the amount of light collected and to preserving information about the angle at which light is emitted from the sample. Systems and methods are described for alignment of the CL mirror in the XY plane, which is orthogonal to the axis of the electron beam, and for alignment of the sample with respect to the focal point of the CL mirror along the Z axis, which is coincident with the electron beam.