Invention Grant
- Patent Title: Methods and apparatus for semiconductor sample workflow
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Application No.: US16405506Application Date: 2019-05-07
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Publication No.: US10707137B2Publication Date: 2020-07-07
- Inventor: Konstantin Balashov , Thomas G. Miller
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01N9/24 ; G01N1/28 ; G03F7/20 ; G01N23/20025 ; G01N23/2204 ; G01N1/32

Abstract:
Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
Public/Granted literature
- US20190355627A1 METHODS AND APPARATUS FOR SEMICONDUCTOR SAMPLE WORKFLOW Public/Granted day:2019-11-21
Information query
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