Invention Grant
- Patent Title: Semiconductor device with redistribution layers formed utilizing dummy substrates
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Application No.: US14449654Application Date: 2014-08-01
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Publication No.: US10707181B2Publication Date: 2020-07-07
- Inventor: Jin Young Kim , Ji Young Chung , Doo Hyun Park , Choon Heung Lee
- Applicant: Amkor Technology, Inc.
- Applicant Address: US AZ Tempe
- Assignee: AMKOR TECHNOLOGY INC.
- Current Assignee: AMKOR TECHNOLOGY INC.
- Current Assignee Address: US AZ Tempe
- Agency: McAndrews, Held & Malloy, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@77534338
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/56 ; H01L23/31 ; H01L23/538 ; H01L25/10 ; H01L21/683 ; H01L21/48

Abstract:
A semiconductor device with redistribution layers formed utilizing dummy substrates is disclosed and may include forming a first redistribution layer on a first dummy substrate, forming a second redistribution layer on a second dummy substrate, electrically connecting a semiconductor die to the first redistribution layer, electrically connecting the first redistribution layer to the second redistribution layer, and removing the dummy substrates. The first redistribution layer may be electrically connected to the second redistribution layer utilizing a conductive pillar. An encapsulant material may be formed between the first and second redistribution layers. Side portions of one of the first and second redistribution layers may be covered with encapsulant. A surface of the semiconductor die may be in contact with the second redistribution layer. The dummy substrates may be in panel form. One of the dummy substrates may be in panel form and the other in unit form.
Public/Granted literature
- US20150221601A1 SEMICONDUCTOR DEVICE WITH REDISTRIBUTION LAYERS FORMED UTILIZING DUMMY SUBSTRATES Public/Granted day:2015-08-06
Information query
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