Invention Grant
- Patent Title: Micromechanical structure and method for manufacturing the same
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Application No.: US15636702Application Date: 2017-06-29
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Publication No.: US10710874B2Publication Date: 2020-07-14
- Inventor: Tobias Frischmuth , Guenter Denifl , Thomas Grille , Ursula Hedenig , Markus Kahn , Daniel Maurer , Ulrich Schmid , Michael Schneider
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner MBB
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@162cd1b7
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81C1/00 ; G01Q70/14 ; H04R7/26 ; G01L7/08 ; G01L1/00 ; B81B3/00 ; G01Q60/24 ; H04R19/02 ; H04R7/10 ; H04R19/04
Abstract:
A micromechanical structure in accordance with various embodiments may include: a substrate; and a functional structure arranged at the substrate; wherein the functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region; and wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa.
Public/Granted literature
- US20180002167A1 MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-01-04
Information query
