Invention Grant
- Patent Title: Memory devices and methods for fabricating the same
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Application No.: US16183143Application Date: 2018-11-07
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Publication No.: US10714483B2Publication Date: 2020-07-14
- Inventor: Huang-Nan Chen , Noriaki Ikeda
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@c485386
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
Memory devices include a first dielectric layer disposed on a substrate. Memory devices include a pair of contacts and a dielectric portion disposed in an opening of the first dielectric layer. The pair of contacts are separated from each other by the dielectric portion. Each contact includes a first conductive portion disposed on the substrate, a second conductive portion disposed over the first conductive portion and a lining layer disposed between the first conductive portion and the second conductive portion and on a sidewall of the opening. The second conductive portion has a sidewall that is in contact with the dielectric portion and the lining layer is not located thereon. The second conductive portion has a corner in connection with the sidewall and a top surface of the second conductive portion, and a protection portion is disposed on the corner.
Public/Granted literature
- US20190319029A1 MEMORY DEVICES AND METHODS FOR FABRICATING THE SAME Public/Granted day:2019-10-17
Information query
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