Invention Grant
- Patent Title: Prism-coupling stress meter with wide metrology process window
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Application No.: US16371517Application Date: 2019-04-01
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Publication No.: US10732059B2Publication Date: 2020-08-04
- Inventor: Ryan Claude Andrews , Chai Hsin Kuang , Rostislav Vatchev Roussev
- Applicant: CORNING INCORPORATED
- Applicant Address: US NY Corning
- Assignee: CORNING INCORPORATED
- Current Assignee: CORNING INCORPORATED
- Current Assignee Address: US NY Corning
- Agent Kevin M. Johnson
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01L1/24 ; G01J3/447 ; G01N33/38 ; G01N21/23 ; G01N21/43

Abstract:
The prism-coupling systems and methods include using a prism-coupling system to collect initial TM and TE mode spectra of a chemically strengthened article having a refractive index profile with a near-surface spike region and a deep region. The initial TM and TE mode spectra are examined to see if they fall within a preferred measurement window that can produce an accurate estimate of the knee stress to within a select tolerance. If not, then measurement configuration of the prism-coupling system is changed and new TM and TE mode spectra are collected. This process is repeated until the new TM and TE mode spectra fall within the preferred measurement window. The new TM and TE mode spectra are then used to determine the knee stress. Changing the measurement configuration can include changing at least one of the measurement wavelength, interfacing fluid thickness and interfacing fluid refractive index.
Public/Granted literature
- US20190301952A1 PRISM-COUPLING STRESS METER WITH WIDE METROLOGY PROCESS WINDOW Public/Granted day:2019-10-03
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