Invention Grant
- Patent Title: Gratings with variable depths formed using planarization for waveguide displays
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Application No.: US15960314Application Date: 2018-04-23
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Publication No.: US10732351B2Publication Date: 2020-08-04
- Inventor: Matthew E. Colburn , Giuseppe Calafiore , Matthieu Charles Raoul Leibovici , Nihar Ranjan Mohanty
- Applicant: Facebook Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Facebook Technologies, LLC
- Current Assignee: Facebook Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Fenwick & West LLP
- Main IPC: G02B6/124
- IPC: G02B6/124 ; G02B27/01 ; H01L21/321 ; H01L21/027 ; G02B5/18 ; G02B6/12 ; H01J37/305

Abstract:
A manufacturing system performs a deposition of an etch-compatible film over a substrate. The etch-compatible film includes a first surface and a second surface opposite to the first surface. The manufacturing system performs a partial removal of the etch-compatible film to create a surface profile on the first surface with a plurality of depths relative to the substrate. The manufacturing system performs a deposition of a second material over the profile created in the etch-compatible film. The manufacturing system performs a planarization of the second material to obtain a plurality of etch heights of the second material in accordance with the plurality of depths in the profile created in the etch-compatible film. The manufacturing system performs a lithographic patterning of a photoresist deposited over the planarized second material to obtain the plurality of etch heights and one or more duty cycles in the second material.
Public/Granted literature
- US20190324202A1 GRATINGS WITH VARIABLE DEPTHS FORMED USING PLANARIZATION FOR WAVEGUIDE DISPLAYS Public/Granted day:2019-10-24
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