- Patent Title: Three-dimensional memory devices and fabricating methods thereof
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Application No.: US16126433Application Date: 2018-09-10
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Publication No.: US10734397B2Publication Date: 2020-08-04
- Inventor: Cheng Zhou , Bin Yuan , QingBo Liu , Song Man Xu , Siying Liu , Rui Gong , Zhiguo Zhao , Zhaoyun Tang , Zhiliang Xia , Zongliang Huo
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5bf20597
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11524 ; H01L27/11548 ; H01L23/532 ; H01L29/417 ; H01L21/28 ; H01L27/11531 ; H01L27/11582 ; H01L27/11575

Abstract:
A method for forming a 3D memory device is disclosed. The method includes: forming an first insulating layer on a substrate in a peripheral region, the first insulating layer having a slope near a boundary between the peripheral region and a core region of the substrate; forming an alternating conductive/dielectric stack on the substrate and the slope of the first insulating layer, a lateral portion of the alternating conductive/dielectric stack extending along a top surface of the substrate in the core region, and an inclined portion of the alternating conductive/dielectric stack extending along the slope of the first insulating layer; and forming a plurality of contacts to electrically contact a plurality of conductive layers in the inclined portion of the alternating conductive/dielectric stack.
Public/Granted literature
- US20190081055A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATING METHODS THEREOF Public/Granted day:2019-03-14
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