Invention Grant
- Patent Title: Preparing patterned neutral layers and structures prepared using the same
-
Application No.: US14310210Application Date: 2014-06-20
-
Publication No.: US10739673B2Publication Date: 2020-08-11
- Inventor: Kuan-Hsin Lo , Ching-Yu Chang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agent Jones Day
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D1/32 ; B05D1/38 ; B05D3/00 ; B05D5/00 ; G03F7/00

Abstract:
Embodiments provided herein provide methods for preparing patterned neutral layers using photolithography, and structures prepared using the same. A method of preparing a structure may include disposing a film over a surface of a substrate, and removing plurality of elongated trenches from the film so as to define a plurality of spaced lines. A neutral layer may be disposed over the outer surface of each line, and may include a neutral group attached to the outer surface of that line via a covalent bond or a hydrogen bond. The surface of the substrate between the lines may be substantially free of the neutral layer.
Public/Granted literature
- US20150367379A1 PREPARING PATTERNED NEUTRAL LAYERS AND STRUCTURES PREPARED USING THE SAME Public/Granted day:2015-12-24
Information query