Invention Grant
- Patent Title: Electron microscope
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Application No.: US16454181Application Date: 2019-06-27
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Publication No.: US10741358B2Publication Date: 2020-08-11
- Inventor: Yuko Shimizu , Hirofumi Iijima , Naoki Hosogi , Jun Yamashita
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@68653bda
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/244 ; H01J37/26

Abstract:
An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.
Public/Granted literature
- US20200013582A1 Electron Microscope Public/Granted day:2020-01-09
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