Invention Grant
- Patent Title: Power MOSFET with a deep source contact
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Application No.: US16101867Application Date: 2018-08-13
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Publication No.: US10746890B2Publication Date: 2020-08-18
- Inventor: Furen Lin , Frank Baiocchi , Haian Lin , Yunlong Liu , Lark Liu , Wei Song , ZiQiang Zhao
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L29/417
- IPC: H01L29/417 ; G01V1/38 ; H01L29/06 ; H01L29/40 ; H01L29/78 ; H01L29/66 ; H01L29/10 ; G01V1/16 ; G01V1/18 ; G01V1/24 ; H01L29/423

Abstract:
A method of forming an electronic device includes forming a plurality of closed loops over a semiconductor substrate. Each closed loop has a first and a second polysilicon gate structure joined at first and second ends. Each closed loop includes an inner portion and an end portion. In the inner portion the first polysilicon gate structure runs about parallel to the second polysilicon gate structure. In the outer portion the first polysilicon gate structure converges with the second polysilicon gate structure. The method further includes forming a plurality of trench contacts. Each of the trench contacts is located between a respective pair of closed loops, passes through an epitaxial layer and contacts the substrate. The length of the trench contacts is no greater than the length of the inner portions.
Public/Granted literature
- US20190004201A1 POWER MOSFET WITH A DEEP SOURCE CONTACT Public/Granted day:2019-01-03
Information query
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