Invention Grant
- Patent Title: Beam splitting prism systems
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Application No.: US16217424Application Date: 2018-12-12
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Publication No.: US10747010B2Publication Date: 2020-08-18
- Inventor: Douglas C. Cappelli , Stanislav Smirnov , Richard Carl Zimmerman , Joshua Adams , Alexander Kenneth Raub , Yevgeniy Konstantinovich Shmarev
- Applicant: ASML Holding N.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01N21/956
- IPC: G01N21/956 ; G03F7/20 ; G02B27/28 ; G01N21/47

Abstract:
According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.
Public/Granted literature
- US20190179162A1 Beam Splitting Prism Systems Public/Granted day:2019-06-13
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