Invention Grant
- Patent Title: X-ray and particle shield for improved vacuum conductivity
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Application No.: US16106914Application Date: 2018-08-21
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Publication No.: US10748740B2Publication Date: 2020-08-18
- Inventor: Rients Jan De Groot , Casper Smit
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/16 ; G21F1/08
Abstract:
An x-ray shield for improved vacuum conductivity is disclosed herein. An example x-ray shield includes at least one elongate member formed from high atomic weight material shaped into a twist with at least 180° of twist.
Public/Granted literature
- US20200066479A1 X-Ray and Particle Shield for Improved Vacuum Conductivity Public/Granted day:2020-02-27
Information query
