Invention Grant
- Patent Title: Mirror device, mirror drive method, light irradiation device, and image acquisition device
-
Application No.: US16095020Application Date: 2017-03-16
-
Publication No.: US10761318B2Publication Date: 2020-09-01
- Inventor: Akira Takahashi
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@134ebcb3
- International Application: PCT/JP2017/010641 WO 20170316
- International Announcement: WO2017/183368 WO 20171026
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; G01N21/64 ; H01J37/29 ; G01S7/481 ; H01J37/28 ; H01J37/304 ; G02B21/00

Abstract:
Provided is a mirror device including a mirror which is supported to be flappable around a fast axis and supported to be flappable around a slow axis and in which a resonance frequency of flapping thereof with respect to the fast axis is a first value and a resonance frequency of the flapping thereof with respect to the slow axis is a second value lower than the first value; a signal extracting portion configured to obtain from a slow axis coil a synthesized signal including an induced signal generated in the slow axis coil due to an operation of flapping the mirror around the fast axis and configured to extract the induced signal from the synthesized signal; and a signal generating portion configured to generates a driving signal so that the flapping of the mirror with respect to the fast axis is in a resonance state according to the induced signal.
Public/Granted literature
- US20190121125A1 MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND IMAGE ACQUISITION DEVICE Public/Granted day:2019-04-25
Information query