Invention Grant
- Patent Title: Memory device using comb-like routing structure for reduced metal line loading
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Application No.: US16168157Application Date: 2018-10-23
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Publication No.: US10762965B2Publication Date: 2020-09-01
- Inventor: Zongliang Huo , Li Hong Xiao , Zhiliang Xia
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: Yangtze Memory Technologies Co, Ltd.
- Current Assignee: Yangtze Memory Technologies Co, Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G11C16/08
- IPC: G11C16/08 ; G11C16/04 ; H01L27/11556 ; H01L27/11573 ; H01L27/11582 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; H01L29/792

Abstract:
Embodiments of three-dimensional memory device architectures and fabrication methods therefor are disclosed. In an example, the memory device includes a substrate and one or more peripheral devices on the substrate. The memory device also includes one or more interconnect layers and a semiconductor layer disposed over the one or more interconnect layers. A layer stack having alternating conductor and insulator layers is disposed above the semiconductor layer. A plurality of structures extend vertically through the layer stack. A first set of conductive lines are electrically coupled with a first set of the plurality of structures and a second set of conductive lines are electrically coupled with a second set of the plurality of structures different from the first set. The first and second sets of conductive lines are vertically distanced from opposite ends of the plurality of structures.
Public/Granted literature
- US20200082886A1 MEMORY DEVICE USING COMB-LIKE ROUTING STRUCTURE FOR REDUCED METAL LINE LOADING Public/Granted day:2020-03-12
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