Invention Grant
- Patent Title: Transistor connected diodes and connected III-N devices and their methods of fabrication
-
Application No.: US16321789Application Date: 2016-09-30
-
Publication No.: US10763350B2Publication Date: 2020-09-01
- Inventor: Han Wui Then , Sansaptak Dasgupta , Marko Radosavljevic
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/054964 WO 20160930
- International Announcement: WO2018/063386 WO 20180405
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/778 ; H01L27/06 ; H01L29/08 ; H01L29/20 ; H01L29/205 ; H01L29/45 ; H01L29/66 ; H01L29/861

Abstract:
Transistor connected diode structures are described. In an example, the transistor connected diode structure includes a group III-N semiconductor material disposed on substrate. A raised source structure and a raised drain structure are disposed on the group III-N semiconductor material. A mobility enhancement layer is disposed on the group III-N semiconductor material. A polarization charge inducing layer is disposed on the mobility enhancement layer, the polarization charge inducing layer having a first portion and a second portion separated by a gap. A gate dielectric layer disposed on the mobility enhancement layer in the gap. A first metal electrode having a first portion disposed on the raised drain structure, a second portion disposed above the second portion of the polarization charge inducing layer and a third portion disposed on the gate dielectric layer in the gap. A second metal electrode disposed on the raised source structure.
Public/Granted literature
- US20200066890A1 TRANSISTOR CONNECTED DIODES AND CONNECTED III-N DEVICES AND THEIR METHODS OF FABRICATION Public/Granted day:2020-02-27
Information query
IPC分类: