Invention Grant
- Patent Title: Nanowire transistor device architectures
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Application No.: US15754709Application Date: 2015-09-25
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Publication No.: US10770458B2Publication Date: 2020-09-08
- Inventor: Rishabh Mehandru , Tahir Ghani , Szuya S. Liao , Seiyon Kim
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2015/052305 WO 20150925
- International Announcement: WO2017/052611 WO 20170330
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/088 ; H01L21/8234 ; H01L29/06 ; H01L29/51 ; H01L29/775 ; H01L29/78 ; B82Y10/00 ; H01L29/786 ; B82Y40/00

Abstract:
Techniques are disclosed for forming nanowire transistor architectures in which the presence of gate material between neighboring nanowires is eliminated or otherwise reduced. In some examples, neighboring nanowires can be formed sufficiently proximate one another such that their respective gate dielectric layers are either: (1) just in contact with one another (e.g., are contiguous); or (2) merged with one another to provide a single, continuous dielectric layer shared by the neighboring nanowires. In some cases, a given gate dielectric layer may be of a multi-layer configuration, having two or more constituent dielectric layers. Thus, in some examples, the gate dielectric layers of neighboring nanowires may be formed such that one or more constituent dielectric layers are either: (1) just in contact with one another (e.g., are contiguous); or (2) merged with one another to provide a single, continuous constituent dielectric layer shared by the neighboring nanowires.
Public/Granted literature
- US20190279978A1 NANOWIRE TRANSISTOR DEVICE ARCHITECTURES Public/Granted day:2019-09-12
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