Invention Grant
- Patent Title: Perpendicular spin transfer torque memory (PSTTM) devices with enhanced perpendicular anisotropy and methods to form same
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Application No.: US16463326Application Date: 2016-12-30
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Publication No.: US10770651B2Publication Date: 2020-09-08
- Inventor: MD Tofizur Rahman , Christopher J. Wiegand , Kaan Oguz , Daniel G. Ouellette , Brian Maertz , Kevin P. O'Brien , Mark L. Doczy , Brian S. Doyle , Oleg Golonzka , Tahir Ghani
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/069528 WO 20161230
- International Announcement: WO2018/125221 WO 20180705
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01F10/32 ; H01L43/10 ; H01L43/12 ; H01L43/00

Abstract:
A material layer stack for a pSTTM device includes a fixed magnetic layer, a tunnel barrier disposed above the fixed magnetic layer and a free layer disposed on the tunnel barrier. The free layer further includes a stack of bilayers where an uppermost bilayer is capped by a magnetic layer including iron and where each of the bilayers in the free layer includes a non-magnetic layer such as Tungsten, Molybdenum disposed on the magnetic layer. In an embodiment, the non-magnetic layers have a combined thickness that is less than 15% of a combined thickness of the magnetic layers in the stack of bilayers. A stack of bilayers including non-magnetic layers in the free layer can reduce the saturation magnetization of the material layer stack for the pSTTM device and subsequently increase the perpendicular magnetic anisotropy.
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