Invention Grant
- Patent Title: Drippage prevention system and method of operating same
-
Application No.: US15597908Application Date: 2017-05-17
-
Publication No.: US10792697B2Publication Date: 2020-10-06
- Inventor: Chien-Hung Wang , Chun-Chih Lin , Chi-Hung Liao , Yung-Yao Lee , Wei Chang Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: B05C5/02
- IPC: B05C5/02 ; B05C11/08 ; B05C11/10 ; H01L21/67 ; F16K37/00 ; F16K31/122 ; F16K7/12 ; F16K23/00 ; G03F7/30 ; G03F7/16

Abstract:
A drippage prevention system including: a first automatic control valve (ACV), an input of the first ACV fluidically connected to a source of fluid to be dispensed, the first ACV having a position ranging from fully closed to fully open; a second ACV, an input of the second ACV being fluidically connected to the output of the first ACV, and an output of the second ACV being fluidically connected to a nozzle, the second ACV having positions ranging from fully closed to fully open; a proxy sensor configured to generate a proxy signal representing an indirect measure of a position of the first ACV; and a controller electrically connected to the first and second ACVs and the proxy sensor, the controller being configured to cause the second ACV to close based on the proxy signal and thereby stop flow of the liquid to the nozzle.
Public/Granted literature
- US20180333738A1 DRIPPAGE PREVENTION SYSTEM AND METHOD OF OPERATING SAME Public/Granted day:2018-11-22
Information query