Invention Grant
- Patent Title: Thermopile infrared individual sensor for measuring temperature or detecting gas
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Application No.: US16309513Application Date: 2017-06-13
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Publication No.: US10794768B2Publication Date: 2020-10-06
- Inventor: Marion Simon , Mischa Schulze , Wilhelm Leneke , Karlheinz Storck , Frank Herrmann , Christian Schmidt , Jörg Schieferdecker
- Applicant: Heimann Sensor GmbH
- Applicant Address: DE Dresden
- Assignee: Heimann Sensor GmbH
- Current Assignee: Heimann Sensor GmbH
- Current Assignee Address: DE Dresden
- Agency: Smartpat PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@71602bd
- International Application: PCT/EP2017/064429 WO 20170613
- International Announcement: WO2017/220381 WO 20171228
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01J5/02 ; G01J5/04 ; G01J5/14 ; G01N21/3504 ; G01J5/12 ; G01J5/06

Abstract:
The invention relates to a thermopile infrared individual sensor in a housing that is filled with a gaseous medium having optics and one or more sensor chips with individual sensor cells with infrared sensor structures with reticulated membranes, the infrared-sensitive regions of which are spanned by, in each case, at least one beam over a cavity in a carrier body with good thermal conduction. The object of the invention consists of specifying a thermopile infrared sensor using monolithic Si-micromechanics technology for contactless temperature measurements, which, in the case of a sufficiently large receiver surface, outputs a high signal with a high response speed and which can operated in a gaseous medium with normal pressure or reduced pressure and which is producible in mass produced numbers without complicated technology for sealing the housing. This is achieved by virtue of, in each case, combining a plurality of individual adjacent sensor cells (18) with respectively one infrared-sensitive region with thermopile structures (14, 15) on the membrane (12) on a common carrier body (1) of an individual chip to a single thermopile sensor structure with a signal output in the housing, consisting of a cap (12) sealed with a base plate (3) with a common gaseous medium (10).
Public/Granted literature
- US20190265105A1 Thermopile infrared individual sensor for measuring temperature or detecting gas Public/Granted day:2019-08-29
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