- Patent Title: Micromechanical component, micromirror-based laser system, and method for monitoring a micromirror-based laser system comprising dual sensor diodes for sensing temperature and light intensity
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Application No.: US15758848Application Date: 2016-09-15
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Publication No.: US10795148B2Publication Date: 2020-10-06
- Inventor: Marko Rocznik
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5440b03c
- International Application: PCT/EP2016/071911 WO 20160915
- International Announcement: WO2017/046291 WO 20170323
- Main IPC: G01J1/44
- IPC: G01J1/44 ; G02B26/08 ; G01J1/42
Abstract:
A micromechanical component for a micromirror-based laser system for detecting an incident laser beam. Two sensor diodes are situated on a shared substrate in the micromechanical component, only one of the two sensor diodes being designed as a photodiode. The further sensor diode supplies an output signal independent of an incidence of light. By comparing the two output signals of the two diodes, an incidence of light in the micromechanical component may be inferred.
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