Invention Grant
- Patent Title: Scanning electron microscope
-
Application No.: US16085727Application Date: 2017-03-03
-
Publication No.: US10796879B2Publication Date: 2020-10-06
- Inventor: Karel Diederick Van Der Mast , Adrianus Franciscus Johannes Hammen , Wilhelmus Henrica Cornelis Theuws , Sander Richard Marie Stoks
- Applicant: PHENOM-WORLD HOLDING B.V.
- Applicant Address: NL Eindhoven
- Assignee: Phenom-World Holding B.V.
- Current Assignee: Phenom-World Holding B.V.
- Current Assignee Address: NL Eindhoven
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@dc27ed9
- International Application: PCT/NL2017/050128 WO 20170303
- International Announcement: WO2017/150977 WO 20170908
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/18 ; H01J37/28 ; H01J37/14 ; H01J37/22 ; H01J37/244

Abstract:
A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.
Public/Granted literature
- US20190103245A1 SCANNING ELECTRON MICROSCOPE Public/Granted day:2019-04-04
Information query