Invention Grant
- Patent Title: Sputtering systems and methods for packaging applications
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Application No.: US15420293Application Date: 2017-01-31
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Publication No.: US10797002B2Publication Date: 2020-10-06
- Inventor: Hoang Mong Nguyen , Matthew Sean Read
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Chang & Hale LLP
- Main IPC: H01L23/552
- IPC: H01L23/552 ; C23C14/50 ; H01L21/285 ; H01L21/683 ; C23C14/54

Abstract:
Sputtering systems and methods for packaging applications. In some embodiments, a method for processing a plurality of packaged devices can include forming or providing a first assembly having a stencil and a two-sided adhesive member attached to a first side of the stencil, with the stencil having a plurality of openings, and the two-sided adhesive member having a plurality of openings corresponding to the openings of the stencil. The method can further include attaching the first assembly to a ring to provide a second assembly, with the ring being dimensioned to facilitate a deposition process. The method can further include loading a plurality of packaged devices onto the second assembly such that each packaged device is held by the two-sided adhesive member of the first assembly and a portion of each packaged device extends into the corresponding opening of the two-sided adhesive member.
Public/Granted literature
- US20170221836A1 SPUTTERING SYSTEMS AND METHODS FOR PACKAGING APPLICATIONS Public/Granted day:2017-08-03
Information query
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