Invention Grant
- Patent Title: Photodetector including a Geiger mode avalanche photodiode and an integrated resistor and related manufacturing method
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Application No.: US16386163Application Date: 2019-04-16
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Publication No.: US10797196B2Publication Date: 2020-10-06
- Inventor: Massimo Cataldo Mazzillo , Valeria Cinnera Martino
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@385e6cd8
- Main IPC: H01L31/14
- IPC: H01L31/14 ; H01L27/14 ; H01L31/024 ; H01L31/0216 ; H01L31/107 ; H01L31/18 ; G01J1/44 ; H01L31/0352 ; H01L27/144

Abstract:
A photodetector includes a Geiger mode avalanche photodiode, which includes a body of semiconductor material, which is delimited by a front surface. The avalanche photodiode further includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The photodetector further includes: a dielectric region, arranged on the front surface; a quenching resistor, which extends on the dielectric region, is electrically connected to the anode region, and is laterally spaced apart with respect to the anode region; and an optical-isolation region, which extends through the dielectric region and laterally delimits a portion of the dielectric region, the anode region extending underneath the portion of the dielectric region, the optical-isolation region being moreover interposed between the portion of the dielectric region and the quenching resistor.
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Information query
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