Invention Grant
- Patent Title: Crystal orientation figure creating device, charged particle beam device, crystal orientation figure creating method, and program
-
Application No.: US16489268Application Date: 2018-10-25
-
Publication No.: US10811217B2Publication Date: 2020-10-20
- Inventor: Takafumi Amino , Takashige Mori , Naoki Maruyama
- Applicant: NIPPON STEEL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIPPON STEEL CORPORATION
- Current Assignee: NIPPON STEEL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4603e2d8
- International Application: PCT/JP2018/039705 WO 20181025
- International Announcement: WO2019/082976 WO 20190502
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/22 ; H01J37/26 ; H01J37/28 ; G01N23/2251

Abstract:
There is provided a crystal orientation figure creating device for use in a charged particle beam device for making a charged particle beam irradiated to a surface of a sample, the crystal orientation figure creating device being configured to create a crystal orientation figure, which is a figure representing a crystal coordinate system of a crystal at a position selected on the surface with respect to an incident direction of the charged particle beam, the crystal orientation figure creating device including: an orientation information acquiring unit configured to acquire crystal orientation information with respect to the incident direction at the selected position; an incident direction information acquiring unit configured to acquire information relating to an incident direction of the charged particle beam with respect to the sample; and a crystal orientation figure creating unit configured to create a crystal orientation figure in a changed incident direction at the selected position, based on the crystal orientation information acquired by the orientation information acquiring unit, and the information relating to the incident direction at the time when the crystal orientation information is acquired and the information relating to the changed incident direction, acquired by the incident direction information acquiring unit.
Public/Granted literature
Information query