Invention Grant
- Patent Title: Substrate transport system, substrate processing apparatus, hand position adjustment method
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Application No.: US16204979Application Date: 2018-11-29
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Publication No.: US10818531B2Publication Date: 2020-10-27
- Inventor: Kuniaki Yamaguchi , Haiyang Xu , Koji Maeda , Mitsuhiko Inaba
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@f68f6df
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/68 ; H01L21/687 ; B65G47/90 ; H01L21/67 ; B25J9/16
Abstract:
A substrate transport system includes a hand, a main positioning member permanently mounted on a base, where the main positioning member is engageable with the hand at a position offset by a first distance in the first axis direction and offset by a second distance in the second axis direction from a substrate transfer position, and a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.
Public/Granted literature
- US20190164796A1 SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND POSITION ADJUSTMENT METHOD Public/Granted day:2019-05-30
Information query
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