Invention Grant
- Patent Title: Actuator-assisted positioning systems and methods
-
Application No.: US16368566Application Date: 2019-03-28
-
Publication No.: US10825646B2Publication Date: 2020-11-03
- Inventor: Graham LeGrove
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/28

Abstract:
A positioning system can include a guide, a carrier element configured to engage and convey a workpiece, a motor having a mover element, a restraint coupled to the carrier element, and an actuator disposed between the restraint and the carrier element. The guide can be movable relative to a horizontal reference plane such that the carrier element coupled to the guide is inclined with respect to the horizontal reference plane. At least the mover element of the motor can be coupled to the carrier element and can be configured to move the carrier element along the guide. The restraint can be configured to selectively engage the guide to restrain movement of the carrier element in at least one direction along the guide when the guide is inclined out of the horizontal reference plane. The actuator can be configured to displace the carrier element relative to the restraint along the guide when the restraint is engaged with the guide.
Public/Granted literature
- US20200312605A1 ACTUATOR-ASSISTED POSITIONING SYSTEMS AND METHODS Public/Granted day:2020-10-01
Information query