Invention Grant
- Patent Title: Studying dynamic specimens in a transmission charged particle microscope
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Application No.: US16364019Application Date: 2019-03-25
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Publication No.: US10825648B2Publication Date: 2020-11-03
- Inventor: Bastiaan Lambertus Martinus Hendriksen , Erik René Kieft
- Applicant: FEI Comapny
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ed6e89c
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/244 ; H01J37/26 ; H01J37/04

Abstract:
Methods and systems for examining a dynamic specimen using a Transmission Charged Particle Microscope are disclosed. An example method includes sparsifying a beam of charged particles to produce at detector an image of a sample comprising a distribution of sub-images that are mutually isolated from one another at least along an elected scan path, and using a scanning assembly to cause relative motion of said image and said detector along said scan path during a time interval Δt so as to smear out each sub-image into a detection streak on said detector, each such streak capturing temporal evolution of its associated sub-image during said time interval Δt.
Public/Granted literature
- US20190311882A1 STUDYING DYNAMIC SPECIMENS IN A TRANSMISSION CHARGED PARTICLE MICROSCOPE Public/Granted day:2019-10-10
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