Invention Grant
- Patent Title: Apparatus and method for mass spectrometry, and method for analyzing semiconductor wafer
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Application No.: US16289168Application Date: 2019-02-28
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Publication No.: US10825674B2Publication Date: 2020-11-03
- Inventor: Kook Joo Kim , KiJu Um , Cheol Sang Yoon , KangTaek Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD. , Industry-Academic Cooperation Foundation, Yonsei University
- Applicant Address: KR Suwon-si, Gyeonggi-Do KR Seoul
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do KR Seoul
- Agency: F. Chau & Associates, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@699b185e
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/16 ; H01L21/67
Abstract:
An apparatus for mass spectrometry includes a plate on which a semiconductor wafer including an organic matter is disposed. A hybrid provider provides a ZnO-graphene hybrid to a predetermined region on the semiconductor wafer. A mass analyzer detects the organic matter in the predetermined region using laser desorption/ionization mass spectrometry (LDI-MS).
Public/Granted literature
- US20190279856A1 APPARATUS AND METHOD FOR MASS SPECTROMETRY, AND METHOD FOR ANALYZING SEMICONDUCTOR WAFER Public/Granted day:2019-09-12
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