Invention Grant
- Patent Title: Metal-insulator-metal capacitor structure
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Application No.: US16506292Application Date: 2019-07-09
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Publication No.: US10825891B2Publication Date: 2020-11-03
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Theodorus E. Standaert , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION ARMONK
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION ARMONK
- Current Assignee Address: US NY Armonk
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L49/02 ; H01L27/11582

Abstract:
The disclosure is directed to semiconductor structures and, more particularly, to Metal-Insulator-Metal (MIM) capacitor structures and methods of manufacture. The method includes: forming at least one gate structure; removing material from the at least one gate structure to form a trench; depositing capacitor material within the trench and at an edge or outside of the trench; and forming a first contact in contact with a first conductive material of the capacitor material and a second contact in contact with a second conductive material of the capacitor material.
Information query
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