Invention Grant
- Patent Title: Active wafer prober preheat-precool system and method for testing wafers
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Application No.: US15971321Application Date: 2018-05-04
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Publication No.: US10830794B2Publication Date: 2020-11-10
- Inventor: Wen-Yuan Hsu
- Applicant: Hermes-Epitek Corp.
- Applicant Address: TW Taipei
- Assignee: HERMES-EPITEK CORP.
- Current Assignee: HERMES-EPITEK CORP.
- Current Assignee Address: TW Taipei
- Agency: Muncy, Geissler, Olds & Lowe, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@163f30c3
- Main IPC: G01R1/44
- IPC: G01R1/44 ; G01R31/26 ; G01R1/073 ; G01R31/28 ; H01L21/67

Abstract:
An active wafer prober preheat-precool system comprises a wafer loading unit used to load at least one wafer; a probe card disposed corresponding to the wafer loading unit and used to test the wafer; a carrying mechanism including a central connector corresponding to the wafer loading unit and having a first opening, wherein the probe card is connected with the central connector and faces the wafer loading unit through the first opening; a peripheral connector having a second opening, wherein the central connector is detachably disposed inside the second opening; and a first temperature regulation unit disposed in the peripheral connector; and a control unit electrically connected with the first temperature regulation unit and controlling the first temperature regulation unit to adjust the temperature of the peripheral connector. The present invention also discloses a method for testing wafers.
Public/Granted literature
- US20180321279A1 ACTIVE WAFER PROBER PREHEAT-PRECOOL SYSTEM AND METHOD FOR TESTING WAFERS Public/Granted day:2018-11-08
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