Methods and devices for manipulating optical signals. In one example, a LCOS (liquid crystal on silicon) device includes a surface bearing an anti-reflection structure. The anti-reflection structure includes i) a physical surface having a topography with features having lateral dimensions of less than 2000 nm and having an average refraction index which decreases with distance away from the surface; and ii) a configuration of the topography, averaged over lateral dimensions of greater than 2000 nm, varies with lateral position on the surface.