- Patent Title: Multilayer thin films exhibiting perpendicular magnetic anisotropy
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Application No.: US15599259Application Date: 2017-05-18
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Publication No.: US10858730B2Publication Date: 2020-12-08
- Inventor: Young Keun Kim , Yong Jin Kim
- Applicant: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Applicant Address: KR Seoul
- Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee Address: KR Seoul
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Priority: KR10-2016-017114 20161214
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01L43/12 ; H01F10/14 ; C23C14/16 ; C23C14/06 ; H01F41/18 ; H01F10/32 ; H01L43/10 ; H01L43/08
Abstract:
A method for forming a multilayer thin film exhibiting perpendicular magnetic anisotropy includes alternately sputtering a CoFeSiB target and a Pd target inside a vacuum chamber to form a [CoFeSiB/Pd] multilayer thin film on a substrate disposed inside the vacuum chamber. The number of times the [CoFeSiB/Pd] multilayer thin film is stacked may be 3 or more.
Public/Granted literature
- US20180166627A1 MULTILAYER THIN FILMS EXHIBITING PERPENDICULAR MAGNETIC ANISOTROPY Public/Granted day:2018-06-14
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