Invention Grant
- Patent Title: Fluoro-based polymer composite target for sputtering
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Application No.: US15547015Application Date: 2016-01-28
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Publication No.: US10861685B2Publication Date: 2020-12-08
- Inventor: Sang Jin Lee , Jae Heung Lee , Woo Jin Choi , Cheol Hwan Kim , Sung Hyun Kim , Seong Geun Cho , Dong Seok Ham , Kwang Je Kim , Dong Soon Park , Jae Seong Park
- Applicant: KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
- Applicant Address: KR Daejeon
- Assignee: KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
- Current Assignee: KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
- Current Assignee Address: KR Daejeon
- Agency: McCoy Russell LLP
- Priority: KR10-2015-0013556 20150128; KR10-2015-0099731 20150714; KR10-2015-0099822 20150714; KR10-2015-0131751 20150917
- International Application: PCT/KR2016/000927 WO 20160128
- International Announcement: WO2016/122223 WO 20160804
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C23C14/12

Abstract:
The fluoro-based polymer composite target for sputtering according to the present invention is excellent in adhesion with a metal electrode to which a voltage is applied, can prevent bending, and is capable of stably forming plasma by imparting conductivity even with industrially widely used DC and MF power supply systems, thereby allowing a fluorinated polymer to be effectively deposited on an adherend by sputtering.
Public/Granted literature
- US20180277341A1 FLUORO-BASED POLYMER COMPOSITE TARGET FOR SPUTTERING Public/Granted day:2018-09-27
Information query
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