Invention Grant
- Patent Title: Vertical stopper for capping MEMS devices
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Application No.: US16254065Application Date: 2019-01-22
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Publication No.: US10882735B2Publication Date: 2021-01-05
- Inventor: Jinbo Kuang , Gaurav Vohra
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00
Abstract:
Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
Public/Granted literature
- US20190152766A1 VERTICAL STOPPER FOR CAPPING MEMS DEVICES Public/Granted day:2019-05-23
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