Invention Grant
- Patent Title: Apparatus and methods for alignment of a susceptor
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Application No.: US14796048Application Date: 2015-07-10
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Publication No.: US10883190B2Publication Date: 2021-01-05
- Inventor: Edric Tong , James Francis Mack , Paul Brillhart
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C30B25/08
- IPC: C30B25/08 ; C23C16/458 ; H05B3/68 ; C30B23/06 ; C30B25/10 ; C30B25/12 ; C30B35/00 ; H05B3/00

Abstract:
The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.
Public/Granted literature
- US20160010239A1 APPARATUS AND METHODS FOR ALIGNMENT OF A SUSCEPTOR Public/Granted day:2016-01-14
Information query
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