Invention Grant
- Patent Title: Extended detachable gas distribution plate and showerhead incorporating same
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Application No.: US16460987Application Date: 2019-07-02
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Publication No.: US10886107B2Publication Date: 2021-01-05
- Inventor: Hamid Noorbakhsh , Xiaoping Zhou
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455 ; B05B1/18 ; B05B1/00

Abstract:
Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a body having a first side and a second side; a gas distribution plate disposed proximate the second side of the body and having an annular channel formed in a side surface; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the clamp includes a body and a protrusion extending radially inward into the annular groove, and wherein a portion of the gas distribution plate extends over a bottom surface of the clamp.
Public/Granted literature
- US20190326100A1 EXTENDED DETACHABLE GAS DISTRIBUTION PLATE AND SHOWERHEAD INCORPORATING SAME Public/Granted day:2019-10-24
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